Models WU-20, WU-25, WU-26

Ultra high purity transducer

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Applications

  • Gas panels for OEM tools
  • Semiconductor, flat panel display and photovoltaic industry
  • Special and bulk-gas supply

Special Features

  • High-accuracy pressure measurement 0.15 % RSS
  • Excellent long-term stability
  • Signal noise shielding and cancellation
  • Active temperature compensation
  • ATEX zone 2 approval, FM class I div. 2 groups A, B, C, D

Description

Reliable
The WU-2x series combines state-of-the-art digital transducer concepts with analogue-like output signals, in order to provide the safest and most accurate pressure measurements necessary for today’s market requirements.

Pressure measurement, based on a true vacuum reference, and electronic measures for interference shielding and signal noise cancellation ensure high-accuracy pressure measurement and excellent long-term stability.

Active temperature compensation reduces the impact of changing temperatures on the transducer, allowing safe operations even in applications with high fluctuations in temperature, e.g. Joule-Thomson effect in the case of gas expansion.

WU-25 (flow through) and WU-26 (surface mount) trans ducers are specifically designed to sustain torsion-applied stresses often incurred during installation. The special design of the thin-film sensor eliminates the risk of sensor failure due to loads at the process connection or welded joints.

Versatile
The WU-2x transducer can be readily installed in indoor or outdoor systems as well as in non-flammable or potentially flammable areas. The hermetically sealed design of the WU-2x prevents the ingress of humidity.

Approvals for non-flammable and potentially flammable environments ensure a high level of product safety. Instruments for temperature class T6 meet the high requirements for low, spontaneous ignition temperature media (phosphine (PH3) and silane (SiH4)).

Compact
With its small footprint the WU-2x is the most compact UHP transducer in the market. Thus it is optimally suited for installation in applications with limited mounting space, and even in existing plants it can be easily retrofitted.

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